Design of MEMS Tunable Capacitor all Metal Microstructure For RF Wireless Applications
نویسندگان
چکیده
In this work a new design of a t u n a b l e c a p a c i t o r b a s e d o n microelectromechanical system (MEMS) technology is presented. The design of high Qtunable capacitor has been accomplished through bulk micromachining process with all metal microstructure. A standard IC fabrication process (HP.5μ) is used to carry out the tunable capacitor. The main features of this high-Q MEMS tunable capacitor is the enabling of a complete monolithic fabrication of RF VCOs using on-chip IC compatible devices. Simulation results are presented to show the MEMS capacitor performance when used in RF VCO circuit. The tunable capacitor shows a high-Q of about 60 at 950 MHz of the VCO oscillating frequency.
منابع مشابه
Design of Direct Exponential Observers for Fault Detection of Nonlinear MEMS Tunable Capacitor
In this paper a novel method is proposed for construction of an exponential observer for nonlinear system. The presented method is based on direct solution of dynamic error without any linearzing of nonlinear terms. Necessary and sufficient conditions for construction of direct observer are presented. Stability of the observer is checked using Lyapunov theorem. Also the ability of this observer...
متن کاملState Estimation of MEMs Capacitor Using Taylor Expansion
This paper deals with state estimation of micro tunable capacitor subjected to nonlinear electrostatic force. For this end a nonlinear observer has been designed for state estimation of the structure. Necessary and sufficient conditions for construction of the observer are presented. Stability of the observer is checked using Lyapunov theorem. Observer design is based on converting of differen...
متن کاملDevelopment of a Wide Tuning Range MEMS Tunable Capacitor for Wireless Communication Systems
We present results on the development of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of one suspended top plate and two fixed bottom plates. One of the two fixed plates and the top plate form a variable capacitor, where as the other fixed plate and the to...
متن کاملRf Mems: Switches and Tunable Capacitors
RF MEMS is a key enabling device technology with the potential for significant performance, cost, and integration benefits to communications and radar applications. An overview of MEMS RF switches and tunable capacitors is presented, with examples of device technologies developed at RSC. Examples of MEMS-based circuits, including tunable filters and phase shifter circuits, are provided to illus...
متن کاملDesign of the Two-Movable Plate Type MEMS Voltage Tunable Capacitor
In this paper, we have proposed and designed the new structure of a RF-MEMS voltage tunable capacitor, which have two-movable parallel plates using electrostatic method and can be fabricated by the MEMS technology. Capacitance of the designed voltage tunable capacitor has from 1.0pF to 1.48pF as the applied bias voltage from 0.5V to 2.52V. The effective area and the distance of the capacitor pl...
متن کامل